977 Wafer Cleaner

Introduction:

ADT Model 977 Wafer Cleaner is designed for cleaning workpieces after dicing. It is equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements

System highlights

• Superb performance (cleaning quality)

• Versatility (add-on options)

• Compact

• Robust design

• Enhanced cleaning process

• Process monitoring

• Customization

Options:

• Built-in exhaust blower

• Ionizer

• IR heater

• Surfactant nozzle and tank

• Water resistivity measurement

• CO2 injector

• Tape-less vacuum holding

• Special customized solutions