Introduction:
ADT 947 Co2 bubbler Inline Injector (CO2 Bubbler) is designed to eliminate
particle adhesion and device damage caused by electrostatic effects. The units
dissolve CO2 gas into de-ionized water (DI) used
for dicing or cleaning processes, thus performing consistent control over an
optimal level of resistivity.
System highlights
• Tabletop design
• Back film removal & collection
mechanism
• Heating stage plate (temperature
controlled)
• Built-in vacuum generator
• Customizable
• Handles all tape types and frame types
(up to 300mm)
• Robust design
Options
• Extended resistivity setting range
• Alarm Buzzer
Dicing Peripherals.pdf
