7132

Front mount 2" air bearing spindle, up to 1.2KW at 60krpm. DC Brushless motor provides close-loop speed control. Compatible with 2"-3" hub and hubless blades. Covering up to 12" round products, 12" x 9" square substrates with frame or 12" x 12" chuck without frame.

The system is equiped with close-loop turn table, optimized for large panels and multi panels such as:

• 12" and 8" Silicon wafers

• PCB, QFN and BGA Panels

• High-brightness LED Packages

• SAW Filters

System Specifications:

Large Area Configuration: up to 300mm x 300mm

Blade size: 2"-3"

Spindle: Air-bearing, DC-brushless, 60 krpm/2.4 kW

High power 2.4kW Spindle (optional)

Indexing Axis (y)

Drive: Ball bearing lead screw with stepper motor

Control: linear encoder

Resolution: 0.2 µm

Cumulative accuracy: 1.5 µm

Index accuracy: 1.0 µm

Feed Axis (x)

Air slide

Drive: Ball bearing lead screw with DC-brushless motor

Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

Drive: Ball bearing lead screw with stepper motor

Resolution: 0.2 µm

Accuracy: 2.0 µm

Repeatability: 1.0 µm

Stroke: 50 mm

Rotary encoder

Z Liner Encoder – Optional

Z Clearance up to 3" - Optional

Rotary Axis (Ø)

Drive: closed-loop, direct drive, DC-brushless

Accuracy: 4 arc-sec

Repeatability: 4 arc-sec

Stroke: 350 deg.

Vision System

Digital camera, Fire-wire technology, Hight bright LED illumination (vertical & oblique)

Continuous digital magnification from x55 to x210 or from x35 to x140 (optional).

Utilities

Electrical: 200-240 VAC, 50/60 Hz, single phase

Air: 260 L/min @ 5.5 bar

Spindle coolant: 1.1 L/min tap water

Cutting water: up to 3 L/min

Dimensions (WXDXH)

965 x 1300 x 1600 mm

Weight: 900 kg